FACILITIES AVAILABLE AT EMDL

Physical Facilities

     Laboratory Space:
     Rooms 202, 210, 212, 216, 220, 222, 226 total 3990 sq. ft.
     Clean Room--200 sq. ft. + Ante room (150 sq. ft.)
     Graduate Student Offices: Room 350 (485 sq. ft.)

Processing Equipment

     AET Rapid Thermal Processor (Model No: RXV4)
     Denton Vacuum Evaporator   DV-502A
     Edwards Coating System-Magnetron/DC and RF Sputtering (Model No: E306A)
     Karl Suss RX Aligner (Model No: MJB-3)
     NRC 703 Thermal Evaporator
     MRL Oxidation Furnace
     Quintel Two Sided Contact Aligner (Model No: Q4000)
     Photo CVD
     Plasma Therm 70 series-PECVD/RIE
     Screen Printer
     Temescal E-Beam Evaporator
     Ultra Sonic Wired Bonder
     Annealing Furnances
     AML Wafer Bonder Aligner (Model No: AML-402HVP)
     Diamond Saw
     Diamond Scriber
     Buehler Wafer Polisher
     Wafer Cleaning Bench
     Wafer Rinser/Dryer
     Lasers

Measurement and Characterization Equipment

     4-Point Probe (Veeco FPP-100)
     Applied Materials Ellipsometer II
     Cryo Probe (Model No: ADP HC-2)
     Hall Measurement
     I-V/C-V Measurement
     Monochrometer with LIF
     Network Analyser
     Nikon Measuring Microscope MM-40
     Perkin Elmer 1600 FTIR Spectrophotometer
     Perkin-Elmer AD-4 Autobalance
     Alessi Probing Station (Model No: S1160)
     Rigaku D/MAX-B X-Ray Diffractometer
     Tencor Alpha Step 200